Application of Auger Electron Spectroscopy in Quantitative Analysis of CuO

The matrix effect corrections were considered in quantitative analysis by Auger electron spectroscopy (AES). Based on Monte Carlo simulation and TPP-2M model, the Auger electron backscattering factor and inelastic mean free path for copper and oxygen elements in CuO were calculated. Also, the CuO standard sample was measured by AES for ten times under the same test condition. The matrix effect correction factors were introduced into AES quantitative analysis. It was observed that the relative errors of the element contents in CuO sample were greatly reduced by the matrix effect correction, and the accuracy of AES quantitative analysis was increased greatly.